Vacuum plays a decisive part in many coating operations in which metals, plastics or glass are deposited in vapour form. In many cases these processes would not be possible without vacuum. A medium or high vacuum is applied to the chamber for its evacuation at the start of the process, after which reaction gases are extracted or solid raw materials vapourized.
All these processes have a common requirement: a completely reliable medium or high vacuum in the chamber that precisely matches the coating process. Such coating operations are carried out to alter the surface characteristics of the material, such as hardness or resistance to corrosion. Vacuum coating may also be used to improve the adhesive or wetting qualities of the material, or to make surfaces permanently hydrophobic or hydrophilic.

Our vacuum systems are delivered with made-to-measure components for all types of vacuum-based coating processes.

Which Busch vacuum solutions are especially suitable for coating processes?
Our product range includes a large number of different vacuum solutions for coating processes, and we supply individual pumps or complete vacuum systems.

COBRA screw vacuum pumps are ideally suited to these applications, and in combination with vacuum-boosters are a proven standard solution for medium vacuum applications.

The large number of variants of both COBRA and vacuum-boosters enables vacuum systems to be designed to match the process exactly. For high vacuum applications we offer Turbo turbomolecular vacuum pump and Rangu diffusion vacuum pump series, which in combination with a backing pump may be configured to suit the coating process precisely.

Examples of Busch Vacuum technology in coating processes:

• Physical Vapour Deposition (PVD)
• Chemical Vapour Deposition (CVD)
• Metallization